| Specifications |
| Material |
| Body, Carriage & Gate |
300 Series ss |
| Bellows |
AM-350 ss |
| Air Cylinder |
Teflon® coated Aluminium |
| Bolts |
300 Series ss |
| Gaskets |
| Bonnet UHV / HV |
OFE Copper / Viton® elastomer |
| Gate |
Viton® or optional Kalrez® 4079
elastomer |
| Piston |
Viton® elastomer |
| Electropneumatic Actuator |
| Air Pressure |
70 to 100 psig |
| Air Control Valve |
410 Series Humphrey solenoid valve |
| Solenoid Power |
120 VAC, 50/60Hz, 4W |
| Power Loss |
Valve closes |
| Position Indicators |
Mechanical, vernier adjustable,
hinged-roller type micro swithes suitable for 5A, 120/240 VAC |
| Vacuum |
| Range |
1x10-11 Torr |
| Leak Test |
2x10-10 cc/sec of He |
| Temperature Range |
| Bakeability under vacuum in Open-Closed positions, with the following Bonnet-Gate
seal combinations. |
| Series |
Open |
Closed |
Bonnet |
Gate |
| UHV |
200°C |
150°C |
Copper |
Viton® |
| UHV |
250°C |
200°C |
Copper |
Kalrez® |
| HV |
150°C |
150°C |
Viton® |
Viton® |
|